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KMID : 1059520000440030200
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Journal of the Korean Chemical Society
2000 Volume.44 No. 3 p.200 ~ p.206
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Determination of Metal Impurities at Near Surface of Silicon Wafer by Etching Method
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김영훈/Kim YH
정혜영/조효영/이보영/유학도/Chung HY/Cho HY/Lee BY/Yoo HD
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Abstract
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KEYWORD
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